A silicon based Fourier transform spectrometer base on an open-loop controlled electrothermal MEMS mirror

Author

Wang, W. ; Chen, J. ; Zivkovic, A.S. ; Duan, C. ; Xie, H.

Author_Institution

Dept. of Electr. & Comput. Eng., Univ. of Florida, Gainesville, FL, USA

fYear

2015

fDate

21-25 June 2015

Firstpage

212

Lastpage

215

Abstract

This paper reports a compact Fourier transform spectrometer system with a large-stroke electrothermal MEMS mirror and other optical components all integrated on a micro-machined silicon base with the dimension of 2cm×2cm. The overall size of the system is reduced dramatically from the prior work [1]. The linear optical path difference (OPD) scan range is increased to 440μm and the mirror plate tilting is compensated down to ±0.002° during the full OPD scan using a new open-loop control method. A spectral resolution of 1.1nm at 532nm is achieved.

Keywords

Fourier transform spectrometers; elemental semiconductors; integrated optics; micromirrors; silicon; Si; linear optical path difference scan range; micromachined silicon base; mirror plate tilting; open-loop control method; open-loop controlled electrothermal MEMS mirror; silicon based Fourier transform spectrometer; spectral resolution; Actuators; Fourier transforms; Micromechanical devices; Micromirrors; Optical interferometry; Silicon; Electrothermal Micromirror; Fourier Transform Spectroscopy; MEMS; Micromirror; Microspectrometer; Open-loop Control;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on

Conference_Location

Anchorage, AK

Type

conf

DOI

10.1109/TRANSDUCERS.2015.7180899

Filename

7180899