Title :
Microscale Fresnel zone plate array on flexible substrate
Author :
Moghimi, Mohammad J. ; Fernandes, Jayer ; Kanhere, Aditi ; Hongrui Jiang
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of Wisconsin, Madison, WI, USA
Abstract :
This paper describes microlens arrays implemented on a flexible substrate. For the first time, we have demonstrated binary Fresnel zone plates fabricated from silicon nanowires embedded in a PDMS matrix. Lens arrays on flexible substrates can potentially benefit from an increased field of view, which is important for applications such as microscopy and surveillance. Lens arrays have wide applications in 3D displays, LCD projectors, optical switches and tunable lasers. We report our design, fabrication and imaging demonstration for silicon based microlens arrays.
Keywords :
elemental semiconductors; microlenses; nanowires; optical arrays; silicon; zone plates; 3D displays; LCD projectors; PDMS matrix; Si; flexible substrate; microlens arrays; microscale fresnel zone plate array; optical switches; silicon nanowires; tunable lasers; Arrays; Imaging; Lenses; Microoptics; Nanowires; Silicon; Substrates; Fresnel zone plates; Microlens arrays; PDMS; flexible substrate; silicon nanowires;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on
Conference_Location :
Anchorage, AK
DOI :
10.1109/TRANSDUCERS.2015.7180944