Title :
A micro laser Doppler velocimeter designed for a wafer-level packaging process
Author :
Morita, N. ; Akiyama, T. ; Nogami, H. ; Hayashida, Y. ; Higurashi, E. ; Ito, T. ; Sawada, R.
Author_Institution :
Grad. Sch. of Syst. Life Sci., Kyushu Univ., Fukuoka, Japan
Abstract :
We develop a micro laser Doppler velocimeter (μ-LDV), designed for fabrication via a wafer-level packaging process for small size and mass production. This sensor is only 1/10,000th the volume of typical commercial LDVs. We successfully performed velocity measurement of moving solid plates and a flowing liquid with suspended particles by FFT analyzing signals obtained by our proposed μ-LDV. It can measure the velocity of any material that by itself or by constituent particles - bubbles, cells, emulsion phases, etc. - can scatter irradiated light: examples include solids like aluminum and cardboard or fluids like water, oil, and air.
Keywords :
Doppler measurement; fast Fourier transforms; laser velocimeters; velocity measurement; wafer level packaging; μ-LDV; FFT analyzing signals; flowing liquid; mass production; microlaser Doppler velocimeter; moving solid plates; small size production; suspended particles; velocity measurement; wafer-level packaging process; Electrodes; Measurement by laser beam; Silicon; Solids; Substrates; Ultrasonic variables measurement; Velocity measurement; Laser Doppler Velocimeter; Optical MEMS; Velocity Measurement; Wafer-Level Packaging;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on
Conference_Location :
Anchorage, AK
DOI :
10.1109/TRANSDUCERS.2015.7180965
