Title :
Fabrication of multi-layer windings in silicon-embedded toroidal inductors
Author :
Xuehong Yu ; Allen, Mark G.
Author_Institution :
Sch. of Electr. & Comput. Eng., Georgia Inst. of Technol., Atlanta, GA, USA
Abstract :
We report a fabrication method for silicon-embedded toroidal inductors with multi-layer windings, based on 3D shadow mask technology. Such multilayer devices boost inductance density within a limited footprint, which is vital for realization of integrated high-power high-frequency power converters. Fabrication of embedded toroidal inductors with double-layer windings is illustrated; characterization shows a 4x inductance increase compared to an embedded inductor with single-layer windings.
Keywords :
inductors; power convertors; 3D shadow mask technology; double-layer windings; high-power high-frequency power converters; inductance density; multilayer devices; multilayer winding fabrication; silicon-embedded toroidal inductors; single-layer windings; Conductors; Copper; Fabrication; Inductance; Inductors; Silicon; Windings; 3-D shadow mask; Silicon embedding; multi-layer windings; toroidal inductors;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on
Conference_Location :
Anchorage, AK
DOI :
10.1109/TRANSDUCERS.2015.7180997
