Title :
A comparison between experiments and fem predictions for blowtorch reflow of fused silica micro-shell resonators
Author :
Shiari, B. ; Darvishian, A. ; Nagourney, T. ; Cho, J. ; Najafi, K.
Author_Institution :
Center for Wireless Integrated MicroSensing & Syst. (WIMS2), Univ. of Michigan, Ann Arbor, MI, USA
Abstract :
We report a non-isothermal model and FEM results for prediction of geometries of fused silica micro-shell resonators fabricated by blowtorch molding process. The model is successfully applied to investigate the production details of 3-D hemi-ellipsoidal shells of revolutions with eccentricity, such as bird-bath shell resonators. The advantages of the present numerical model are that the shell geometry and thickness can be optimized by changing different fabrication parameters such as surface heat flux, conductivity of mold material and initial temperature of the mold. The model brings out the blowtorch molding capabilities and limitations for fabrication of hollow 3-D shell resonators.
Keywords :
blow moulding; finite element analysis; micromechanical resonators; 3D hemi-ellipsoidal shells; FEM results; bird-bath shell resonators; blowtorch molding process; fabrication parameters; fused silica micro-shell resonators; geometries prediction; hollow 3D shell resonators; mold initial temperature; mold material conductivity; non-isothermal model; shell geometry; surface heat flux; Fabrication; Films; Finite element analysis; Heating; Numerical models; Silicon compounds; Viscosity; Blowtorch; Finite element analysis; Fused silica; Gyroscope; Heat transfer; Micro-shell; Resonator; Viscosity;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on
Conference_Location :
Anchorage, AK
DOI :
10.1109/TRANSDUCERS.2015.7181038
