• DocumentCode
    731807
  • Title

    A comparison between experiments and fem predictions for blowtorch reflow of fused silica micro-shell resonators

  • Author

    Shiari, B. ; Darvishian, A. ; Nagourney, T. ; Cho, J. ; Najafi, K.

  • Author_Institution
    Center for Wireless Integrated MicroSensing & Syst. (WIMS2), Univ. of Michigan, Ann Arbor, MI, USA
  • fYear
    2015
  • fDate
    21-25 June 2015
  • Firstpage
    776
  • Lastpage
    779
  • Abstract
    We report a non-isothermal model and FEM results for prediction of geometries of fused silica micro-shell resonators fabricated by blowtorch molding process. The model is successfully applied to investigate the production details of 3-D hemi-ellipsoidal shells of revolutions with eccentricity, such as bird-bath shell resonators. The advantages of the present numerical model are that the shell geometry and thickness can be optimized by changing different fabrication parameters such as surface heat flux, conductivity of mold material and initial temperature of the mold. The model brings out the blowtorch molding capabilities and limitations for fabrication of hollow 3-D shell resonators.
  • Keywords
    blow moulding; finite element analysis; micromechanical resonators; 3D hemi-ellipsoidal shells; FEM results; bird-bath shell resonators; blowtorch molding process; fabrication parameters; fused silica micro-shell resonators; geometries prediction; hollow 3D shell resonators; mold initial temperature; mold material conductivity; non-isothermal model; shell geometry; surface heat flux; Fabrication; Films; Finite element analysis; Heating; Numerical models; Silicon compounds; Viscosity; Blowtorch; Finite element analysis; Fused silica; Gyroscope; Heat transfer; Micro-shell; Resonator; Viscosity;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on
  • Conference_Location
    Anchorage, AK
  • Type

    conf

  • DOI
    10.1109/TRANSDUCERS.2015.7181038
  • Filename
    7181038