Title :
MEMS mirrors submerged in liquid for wide-angle scanning
Author :
Xiaoyang Zhang ; Rui Zhang ; Koppal, Sanjeev ; Butler, Lisa ; Xiang Cheng ; Huikai Xie
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of Florida, Gainesville, FL, USA
Abstract :
This paper reports an electrothermal MEMS scanning mirror working in liquid for the first time. By submerging the MEMS mirror into a mineral oil whose refractive index is 1.47, a wide-angle optical scan (>120°) was achieved at small driving voltage (<;10V), and the scan frequency reached up to 30 Hz. The wide angle was achieved because of the angular increase of the “Snell´s Window” effect and the large mechanical tilt angle (±18°) of the MEMS mirror as well. The power consumption is 9.9 mW/° when working in air and 11.7 mW/° in the mineral oil. This submerged optical scanner may enable many new applications of wide-angle optics.
Keywords :
micromirrors; minerals; oils; power consumption; refractive index; Snell´s window effect; electrothermal MEMS scanning mirror; mechanical tilt angle; mineral oil; power consumption; refractive index; scan frequency; wide-angle scanning; Actuators; Laser beams; Liquids; Micromechanical devices; Minerals; Mirrors; Temperature measurement; MEMS mirror; electrothermal bimorph; large mechanical angle; mineral oil; submerge; wide-angle scanning;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on
Conference_Location :
Anchorage, AK
DOI :
10.1109/TRANSDUCERS.2015.7181056
