DocumentCode :
731839
Title :
Resonant-cantilever as micro-instrument to extract activation-energy (Ea) of molecule adsorption for kinetics modeling of gas sensing materials
Author :
Pengcheng Xu ; Xinxin Li ; Haitao Yu
Author_Institution :
State Key Lab. of Transducer Technol., Shanghai Inst. of Microsyst. & Inf. Technol., Shanghai, China
fYear :
2015
fDate :
21-25 June 2015
Firstpage :
953
Lastpage :
956
Abstract :
In this work, resonant microcantilever sensor is firstly used for real-time record of gas uptake on sensing material to extract the key kinetic parameter of activation energy (Ea), which characterizes molecule adsorbing rate. With the extracted parameter of Ea, the important gas sensing performance of response speed can be quantitatively evaluated with theory of molecule sorption kinetics and optimally designed based on modeling guidance. With the developed new method, two CO2 sensing materials of mono-amine and dual-amine modified mesoporous-silica nanoparticles are examined respectively.
Keywords :
adsorption; cantilevers; carbon compounds; gas sensors; micromechanical resonators; microsensors; nanoparticles; nanosensors; velocity measurement; CO2; activation-energy parameter extraction; dual-amine modified mesoporous-silica nanoparticle; gas sensing material; microinstrument; molecule adsorbing rate; molecule sorption kinetics theory; monoamine modified mesoporous-silica nanoparticle; resonant microcantilever sensor; speed measurement; Adsorption; Kinetic theory; Mesoporous materials; Nanoparticles; Temperature measurement; Temperature sensors; Activation energy; Greenhouse gas; Kinetics; Molecule adsorbing rate; Resonant microcantilever;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on
Conference_Location :
Anchorage, AK
Type :
conf
DOI :
10.1109/TRANSDUCERS.2015.7181082
Filename :
7181082
Link To Document :
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