Title :
Selective environmental benzene monitoring microsystem based on optimized supramolecular receptors
Author :
Elmi, I. ; Masini, L. ; Cardinali, G.C. ; Dalcanale, E. ; Pinalli, R. ; Trzcinski, J.W. ; Suriano, F. ; Zampolli, S.
Author_Institution :
Inst. for Microelectron. & Microsyst. (IMM), Bologna, Italy
Abstract :
We report on a simple microsystem for the analytical quantification of benzene in parts per billion (ppb) concentration. The system is based on a commercial photoionization detector (PID) and a MEMS cartridge, filled with innovative supramolecular cavitand receptors. The heater integrated on the MEMS device enables fine tuning of its temperature and operating the cartridge as both purge-and-trap and gas chromatographic (GC) column. By means of a smart signal process algorithm based on fuzzy neural network (FNN) the system is able to exactly quantify benzene also in mixture containing others aromatic species. Functional characterization results are shown.
Keywords :
chemical sensors; chromatography; fuzzy neural nets; microsensors; organic compounds; photodetectors; photoionisation; FNN; GC column; MEMS cartridge device; PID; aromatic species; fuzzy neural network; gas chromatographic column; optimized supramolecular cavitand receptor; photoionization detector; purgeand-trap column; selective environmental benzene monitoring microsystem; smart signal process algorithm; Detectors; Fuzzy neural networks; Heating; Micromechanical devices; Monitoring; Silicon; MEMS; Microsystem; PID; benzene; cavitand; selective; supramolecular receptor;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on
Conference_Location :
Anchorage, AK
DOI :
10.1109/TRANSDUCERS.2015.7181083