Piezoelectric response optimization of multi roof tile-shaped modes in MEMS resonators by variation of the support boundary conditions

This paper investigates strain-related conductance peaks ΔG of advanced roof tile-shaped vibration-modes in piezoelectrically actuated resonators by variation of the support boundary conditions, leading to a complete new class of liquid monitoring sensors. These new vibration-modes feature very high Q-factors in liquid media and enhanced volume-strain values in the device. Combined with an optimized electrode design, the enhanced volume-strain results in very high strain-related conductance peaks ΔG. Furthermore, the impact on the piezoelectric response ΔG/Q is studied, leading to an increased ΔG/Q ratio by ~25% compared to single-side clamped resonators. These features predestinate this new class of vibration-modes for a large variety of challenging resonator-based sensing applications in liquid media exceeding the overall performance of commonly used out-of-plane vibration-modes.