• DocumentCode
    731845
  • Title

    The effect of charge redistribution on limiting the kt2.Q product of piezoelectrically transduced resonators

  • Author

    Tabrizian, R. ; Rais-Zadeh, M.

  • Author_Institution
    Electr. Eng. & Comput. Sci, Univ. of Michigan, Ann Arbor, MI, USA
  • fYear
    2015
  • fDate
    21-25 June 2015
  • Firstpage
    981
  • Lastpage
    984
  • Abstract
    In this paper, we introduce a new loss mechanism that can significantly limit the quality factor (Q) of piezoelectrically transduced resonators. We show that the electromagnetic energy dissipated in the anharmonic process of free charge redistribution on metallic electrodes placed on commonly used piezoelectric materials sets a limit for the resonator Q that is frequency independent and is much smaller than the Akheiser Q limit at frequencies less than 1 GHz. To validate this theory, the Q limit is formulated for extensional bulk acoustic modes with in-plane polarization and compared with published measured data, showing reasonable agreement.
  • Keywords
    Q-factor; crystal resonators; electrodes; electromagnetic wave polarisation; micromechanical resonators; piezoelectric materials; piezoelectric transducers; Akheiser Q limit; anharmonic process; bulk acoustic modes; electromagnetic energy; free charge redistribution; in-plane polarization; loss mechanism; metallic electrodes; piezoelectric materials; piezoelectrically transduced resonators; quality factor; Acoustics; Aluminum nitride; Electrodes; III-V semiconductor materials; Piezoelectric films; Vibrations; Energy dissipation; MEMS; micromechanical resonator; phonon loss; piezoelectric transduction; quality factor;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on
  • Conference_Location
    Anchorage, AK
  • Type

    conf

  • DOI
    10.1109/TRANSDUCERS.2015.7181089
  • Filename
    7181089