Title :
A MEMS tunable photonic ring resonator with small footprint and large free spectral range
Author :
Errando-Herranz, Carlos ; Niklaus, Frank ; Stemme, Goran ; Gylfason, Kristinn B.
Author_Institution :
KTH R. Inst. of Technol., Stockholm, Sweden
Abstract :
We demonstrate a MEMS tunable silicon photonic ring resonator with a 20 μm radius and a 5 nm free spectral range (FSR) for wavelength selection in reconfigurable optical networks. The device shows a loaded Q of 12000, and 300 pm tuning range at a wavelength of 1544 nm.
Keywords :
elemental semiconductors; micromechanical resonators; nanophotonics; optical resonators; silicon; FSR; MEMS tunable photonic ring resonator; Si; large free spectral range; reconfigurable optical networks; silicon photonic ring resonator; small footprint; wavelength 1544 nm; wavelength selection; Micromechanical devices; Optical fiber networks; Optical filters; Optical ring resonators; Optical waveguides; Silicon; Tuning; Silicon photonics; reconfigurable optical networks; ring resonator; tunable ring resonators;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on
Conference_Location :
Anchorage, AK
DOI :
10.1109/TRANSDUCERS.2015.7181094
