A novel resonant accelerometer based on mode localization of weakly coupled resonators

Author

Zhang, H.M. ; Yuan, W.Z. ; Li, B.Y. ; Hao, Y.C. ; Kraft, M. ; Chang, H.L.

Author_Institution

MOE Key Lab. of Micro & Nano Syst. for Aerosp., Northwestern Polytech. Univ., Xi´an, China

fYear

2015

fDate

21-25 June 2015

Firstpage

1073

Lastpage

1076

Abstract

This paper describes a novel MEMS resonant accelerometer based on two weakly coupled resonators (WCRs) using the phenomenon of mode localization. To the best of the authors´ knowledge, it is the first time that this principle is experimentally demonstrated for an accelerometer. When acceleration acts on the two proof masses, there will be a differential electrostatic stiffness perturbation introduced on the WCRs, which leads to mode localization and mode shape change. Therefore, the acceleration can be sensed by measuring the amplitude ratio shift. The measured relative shift in amplitude ratio (~312162 ppm/g) is 302 times higher than the shift in resonance frequency (~1035 ppm/g).

Keywords

accelerometers; micromechanical resonators; microsensors; MEMS resonant accelerometer; amplitude ratio shift; differential electrostatic stiffness perturbation; mode localization; mode shape change; relative shift; resonance frequency; weakly coupled resonators; Acceleration; Accelerometers; Couplings; Resonant frequency; Sensitivity; Sensors; Vibrations; Resonant accelerometer; high sensitivity; mode localization; weakly coupled resonators;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on

Conference_Location

Anchorage, AK

Type

conf

DOI

10.1109/TRANSDUCERS.2015.7181112

Filename

7181112