Title :
A resonnat accelerometer based on ring-down measurement
Author :
Zhai, D.H. ; Liu, D.C. ; He, C.H. ; Guan, R. ; Lin, L.T. ; Dong, L.G. ; Zhao, Q.C. ; Yang, Z.C. ; Yan, G.Z.
Author_Institution :
Nat. Key Lab. of Sci. & Technol. on Micro/Nano Fabrication, Peking Univ., Beijing, China
Abstract :
In this paper, a micromachined differential resonant accelerometer with electrostatic stiffness tuning is presented. The ring-down measurement is used for the first time to pick-up the real-time resonant frequencies of the accelerometer, which is more robust to device parameter variations and parasitic capacitances compared with the self-sustained oscillation based read-out. The total output drift over the temperature range of 120 °C for a single resonator and differential ones are 40.9 Hz and 1.0 Hz respectively, indicating a self-calibration capability of the differential configuration.
Keywords :
accelerometers; calibration; micromachining; microsensors; readout electronics; real-time systems; electrostatic stiffness tuning; frequency 1.0 Hz; frequency 40.9 Hz; micromachined differential resonant accelerometer; parasitic capacitances; real-time resonant frequencies; ring-down measurement; self-calibration capability; self-sustained oscillation based read-out; temperature 120 degC; Accelerometers; Frequency measurement; Frequency modulation; Optical resonators; Oscillators; Resonant frequency; Temperature measurement; Differential resonant accelerometer; ring-down measurement; self-calibration;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on
Conference_Location :
Anchorage, AK
DOI :
10.1109/TRANSDUCERS.2015.7181125
