Integrated CMOS MEMS liquid capacitive inclinometer

Author

Yi Chiu ; Bo-Ting Chen ; Hao-Chao Hong

Author_Institution

Dept. of Electr. & Comput. Eng., Nat. Chiao Tung Univ., Hsinchu, Taiwan

fYear

2015

fDate

21-25 June 2015

Firstpage

1152

Lastpage

1155

Abstract

This paper reports a miniaturized CMOS MEMS capacitive inclinometer with dielectric liquid sensing medium in the reservoir on top of the CMOS substrate. A DFR/glass cap is bonded to the CMOS chip to form a reservoir for the sensing liquid. Rotating/tilting the sensor changes the electrode area covered by the liquid and leads to a change of capacitance. The packaged sensor had a dimension of 2.4×2.4×1.2 mm³. Experimental results obtained by the on-chip readout circuit showed the proposed inclinometer had a sensitivity of 0.48 mV/deg in the linear range between ±60°. With proper calibration, the linear range can be extended to ±90°.

Keywords

CMOS integrated circuits; calibration; capacitance measurement; capacitive sensors; dielectric devices; dielectric liquids; electrodes; glass; integrated circuit bonding; integrated circuit design; integrated circuit packaging; microfabrication; microsensors; readout electronics; DFR-glass cap; bonding; calibration; dielectric liquid sensing; electrode; integrated CMOS MEMS liquid capacitive inclinometer; on-chip readout circuit; CMOS integrated circuits; Capacitance; Electrodes; Liquids; Micromechanical devices; Reservoirs; Sensors; CMOS MEMS; SU-8; dry-film resist (DFR); inclinometer; liquid; packaging;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on

Conference_Location

Anchorage, AK

Type

conf

DOI

10.1109/TRANSDUCERS.2015.7181132

Filename

7181132