Title :
Investigation of a broadband micromachined thermoelectric microwave power sensor with a cantilever beam
Author :
Wang, D.B. ; Fang, Y.M.
Author_Institution :
Nanjing Univ. of Posts & Telecommun., Nanjing, China
Abstract :
This paper reports a novel thermoelectric microwave power sensor with a MEMS cantilever beam in order to improve the measurement dynamic range and the band width. The measured results show that the MEMS cantilever beam can improve the dynamic range by increasing the top end of the range into no less than 200mW, and enhance the band width by increasing the top end of the range into no less than 36GHz.
Keywords :
electric sensing devices; micromachining; microsensors; microwave detectors; microwave measurement; power measurement; temperature measurement; temperature sensors; thermoelectric devices; MEMS cantilever beam; broadband micromachined thermoelectric microwave power sensor; Capacitance; Capacitance measurement; Electromagnetic heating; Micromechanical devices; Microwave communication; Microwave measurement; Structural beams; MEMS; Thermoelectric; cantilever beam; power sensor;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on
Conference_Location :
Anchorage, AK
DOI :
10.1109/TRANSDUCERS.2015.7181139
