Inline pressure sensing mechanisms enabling scalable range and sensitivity

Author

Alveringh, D. ; Groenesteijn, J. ; Wiegerink, R.J. ; Lotters, J.C.

Author_Institution

MESA+ Inst. for Nanotechnol., Univ. of Twente, Enschede, Netherlands

fYear

2015

fDate

21-25 June 2015

Firstpage

1187

Lastpage

1190

Abstract

We report on two novel capacitive pressure sensing mechanisms that allow measurements inline with other fluidic devices on one chip, without introducing a large internal volume to the fluid path. The first sensing mechanism is based on out-of-plane bending of a U-shaped channel and the same structure could be used for thermal flow sensing simultaneously. The second mechanism is based on deformation of the cross-section of the tube and allows for differential capacitive readout. The sensitivity and range of both mechanisms are scalable. The current implementations are tested up to 2.45 bar and 1 bar respectively.

Keywords

bending; capacitance measurement; capacitive sensors; channel flow; deformation; flow measurement; flow sensors; fluidic devices; pipe flow; pipes; pressure measurement; pressure sensors; temperature measurement; temperature sensors; capacitive readout; cross-section deformation; fluidic device; inline capacitive pressure sensing mechanism; out-of-plane U-shaped channel bending; thermal flow sensing; tube; Capacitance; Capacitive sensors; Electron tubes; Pressure measurement; Sensitivity; Voltage measurement; Pressure sensor; capacitive readout; lab-on-a-chip; surface channel technology;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on

Conference_Location

Anchorage, AK

Type

conf

DOI

10.1109/TRANSDUCERS.2015.7181141

Filename

7181141