Title :
Inline pressure sensing mechanisms enabling scalable range and sensitivity
Author :
Alveringh, D. ; Groenesteijn, J. ; Wiegerink, R.J. ; Lotters, J.C.
Author_Institution :
MESA+ Inst. for Nanotechnol., Univ. of Twente, Enschede, Netherlands
Abstract :
We report on two novel capacitive pressure sensing mechanisms that allow measurements inline with other fluidic devices on one chip, without introducing a large internal volume to the fluid path. The first sensing mechanism is based on out-of-plane bending of a U-shaped channel and the same structure could be used for thermal flow sensing simultaneously. The second mechanism is based on deformation of the cross-section of the tube and allows for differential capacitive readout. The sensitivity and range of both mechanisms are scalable. The current implementations are tested up to 2.45 bar and 1 bar respectively.
Keywords :
bending; capacitance measurement; capacitive sensors; channel flow; deformation; flow measurement; flow sensors; fluidic devices; pipe flow; pipes; pressure measurement; pressure sensors; temperature measurement; temperature sensors; capacitive readout; cross-section deformation; fluidic device; inline capacitive pressure sensing mechanism; out-of-plane U-shaped channel bending; thermal flow sensing; tube; Capacitance; Capacitive sensors; Electron tubes; Pressure measurement; Sensitivity; Voltage measurement; Pressure sensor; capacitive readout; lab-on-a-chip; surface channel technology;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on
Conference_Location :
Anchorage, AK
DOI :
10.1109/TRANSDUCERS.2015.7181141
