A micromachined fluidic reduced inertial measurement unit using thermal expansion flow principle

Author

Wang, S.S. ; Gong, X.H. ; Nie, B. ; Yuan, W.Z. ; Chang, H.L.

Author_Institution

MOE Key Lab. of Micro & Nano Syst. for Aerosp., Northwestern Polytech. Univ., Xi´an, China

fYear

2015

fDate

21-25 June 2015

Firstpage

1223

Lastpage

1226

Abstract

This paper presents a micromachined fluidic integrated reduced inertial measurement unit based on the thermal expansion flow principle. The proposed multi-axis gas sensor can achieve the simultaneous detection of single-axis (Z-axis) angular rate and dual-axis (X-axis and Y-axis) acceleration using one chamber. To the best of the authors´ knowledge, it is the first time that such a multi-axis thermal expansion flow inertial sensor is reported. A large measurement range has been demonstrated, e.g., the Z-axis gyroscope can achieve a sensitivity of 0.548 mV/°/s with a nonlinearity less than 3.87% within the input range of ±2160 °/s.

Keywords

acceleration measurement; flow measurement; flow sensors; gas sensors; gyroscopes; microfluidics; micromachining; microsensors; temperature sensors; thermal expansion measurement; X-axis acceleration detection; Y-axis acceleration detection; Z-axis angular rate detection; Z-axis gyroscope; dual-axis acceleration detection; micromachined fluidic reduced inertial measurement unit; multiaxis gas sensor; multiaxis thermal expansion flow inertial sensor; single-axis angular rate detection; Acceleration; Gyroscopes; Heating; Sensitivity; Sensors; Thermal expansion; Thermistors; Thermal expansion flow; accelerometer; gyroscope; multi-axis gas sensor; thermistor;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on

Conference_Location

Anchorage, AK

Type

conf

DOI

10.1109/TRANSDUCERS.2015.7181150

Filename

7181150