Title :
Accelerated lifetime and reliability testing of large-deflection piezoelectric microsystems
Author :
Rudy, R.Q. ; Sanchez, L.M. ; Tellers, M. ; Polcawich, R.G.
Author_Institution :
US Army Res. Lab., Adelphi, MD, USA
Abstract :
This paper reports, for the first time, accelerated lifetime testing and reliability of large displacement piezoelectric micro-electromechanical systems (MEMS) over trillions of cycles. Electrical, mechanical, and piezoelectric properties of cantilevers have been monitored over time and the surface topology has been observed through scanning electron microscopy.
Keywords :
cantilevers; life testing; micromechanical devices; scanning electron microscopy; MEMS; accelerated lifetime testing; cantilevers; electrical properties; large-deflection piezoelectric microsystems; mechanical properties; micro-electromechanical systems; piezoelectric properties; reliability testing; scanning electron microscopy; surface topology; Arrays; Micromechanical devices; Reliability; Resonant frequency; Scanning electron microscopy; Testing; MEMS; Piezoelectric; lifetime; reliability;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on
Conference_Location :
Anchorage, AK
DOI :
10.1109/TRANSDUCERS.2015.7181173
