Title :
Fabrication of nanowires from Polyimide for transparent SERS devices
Author :
Tang, L.C. ; Mao, H.Y. ; Wang, Y. ; Ou, W. ; Wu, W.G. ; Tan, Q.L. ; Xiong, J.J.
Author_Institution :
Key Lab. of Microelectron. Devices & Integrated Technol., Inst. of Microelectron., Beijing, China
Abstract :
In this work, free-standing nanowires with high transparency are fabricated from Polyimide (PI), adopting a lithography-free and micromachining-compatible process, which involves only PI spin-coating and Ar-plasma bombardment. By sputtering a thin layer of noble metal on the nanowires, surface-enhanced Raman scattering (SERS) devices can be obtained. Since the fabrication process is independent of substrate materials, nanowires are able to be generated on glass substrates, thus transparent SERS devices are achieved. In the devices, penetration of laser from the back side to detect molecules on the top surfaces is allowed. With such devices, a new route for practical detection of various analytes is opened, consequently, application fields of the SERS devices can be broadened.
Keywords :
nanofabrication; nanowires; spin coating; surface enhanced Raman scattering; transparency; SiO2; argon-plasma bombardment; glass substrates; lithography-free method; micromachining-compatible method; nanowires; polyimide; spin-coating; sputtering; surface-enhanced Raman scattering; transparency; transparent SERS devices; Fabrication; Glass; Metals; Nanoscale devices; Nanowires; Substrates; Nanowires; Plasma repolymerization; Surface-enhanced Raman scattering (SERS); Transparent devices;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on
Conference_Location :
Anchorage, AK
DOI :
10.1109/TRANSDUCERS.2015.7181194