Title :
Multi tips atomic force microscopy for dynamic nanomovement detection
Author :
Chiou, Y.K. ; Chang, J.M. ; Chen, Y.C. ; Tseng, F.G. ; Wang, P.C.
Author_Institution :
Dept. of Eng. & Syst. Sci., Nat. Tsing Hua Univ., Hsinchu, Taiwan
Abstract :
In this paper, we nano-engineered commercial atomic force microscope (AFM) probes with multi nano tip structures for high speed/resolution dynamic nanodetection. The tip radius could be shrunk down to 2.5 nm, and the time resolution could be approaching 10 ms for measuring particle movement. The multi tip AFM can be applicable for detecting the dynamic movement of bio-molecules in situ.
Keywords :
atomic force microscopy; AFM tip; biomolecules; dynamic nanodetection; dynamic nanomovement detection; multinano tip structures; multitips atomic force microscopy; particle movement; Atmospheric measurements; Atomic force microscopy; Dynamics; Force; Probes; Silicon nitride; Atomic fore microscope (AFM); high speed/resolution dynamic nanodetection; multi nano tip structures;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on
Conference_Location :
Anchorage, AK
DOI :
10.1109/TRANSDUCERS.2015.7181198
