• DocumentCode
    731922
  • Title

    Porous silicon based infrared photonic-sensor for high sensitive heavy metal ion detection

  • Author

    Jian-Ren Lai ; Jen-Kuei Wu ; Minh-Hang Nguyen ; Fan-Gang Tseng

  • Author_Institution
    Dept. of Eng. & Syst. Sci., Nat. Tsing Hua Univ., Hsinchu, Taiwan
  • fYear
    2015
  • fDate
    21-25 June 2015
  • Firstpage
    1476
  • Lastpage
    1478
  • Abstract
    In this paper we report the development of an ultrasensitive photonic sensor based on nanoporous silicon (NPS) substrate for heavy metal ions detection in a FTIR reflection system. A one-dimensional photonic crystal with disturbed Bragg reflector (DBR) fabricated by successive electrochemical etchings (ECE) is employed to enhance the reflected IR signals [1] [2]. This well-defined NPS nanostructures will be red shifted due to the increase in the refractive index of the Fe3+ ion solution (1 mM). The Fe3+ with difference concentration due to difference spectrum shift, and the average sensitivity is 22.3cm-1/mM corresponding to a detection limit of 10.8 ppm.
  • Keywords
    Bragg gratings; Fourier transform infrared spectra; distributed Bragg reflectors; electrochemical sensors; light reflection; nanofabrication; nanophotonics; nanoporous materials; nanosensors; optical sensors; photonic crystals; red shift; refractive index; silicon; 1D photonic crystal; DBR; FTIR reflection system; NPS nanostructures; Si; disturbed Bragg reflector; electrochemical etchings; heavy metal ion detection; nanoporous silicon substrate; red shift; reflected IR signal enhancement; refractive index; spectrum shift; ultrasensitive photonic sensor; Current density; Etching; Indexes; Metals; Microcavities; Photonic crystals; Silicon; FTIR spectra; Porous silicon etching; heavy metal ion; photonic sensor;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on
  • Conference_Location
    Anchorage, AK
  • Type

    conf

  • DOI
    10.1109/TRANSDUCERS.2015.7181214
  • Filename
    7181214