Title :
High-Q on-chip microwave resonator for sensitive permittivity detection in nanoliter volumes
Author :
Watson, A.M. ; Padilla, A. ; Holloway, C.L. ; Bright, V.M. ; Booth, J.C.
Author_Institution :
Dept. of Mech. Eng., Univ. of Colorado, Boulder, CO, USA
Abstract :
This work presents the design, fabrication and characterization results for a thick film (6μm Cu), coplanar waveguide (CPW) resonator operating at 2.2GHz with a high quality factor Q (~177), integrated with a microfluidic channel. We demonstrate detection of changes in permittivity of 0.8% with a sample volume of 30nL, and estimate a lower detection limit of 0.05% (500ppm) with this device.
Keywords :
biological techniques; coplanar waveguides; microfluidics; microwave resonators; permittivity measurement; coplanar waveguide resonator; frequency 2.2 GHz; high-Q on-chip microwave resonator; metal thick film; microfluidic channel; nanoliter volumes; sensitive permittivity detection; size 6 mum; Coplanar waveguides; Copper; Fluids; Microfluidics; Permittivity; Permittivity measurement; Resonant frequency; Lab-on-a-chip; RF resonator; coplanar waveguide; microfluidics; permittivity detection;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on
Conference_Location :
Anchorage, AK
DOI :
10.1109/TRANSDUCERS.2015.7181262
