Title :
Encapsulation of integrated circuits in plastic microfluidic systems using hot embossing
Author :
Iyer, V. ; Murali, P. ; Paredes, J. ; Liepmann, D. ; Boser, B.
Author_Institution :
Berkeley Sensors & Actuators Center, Berkeley, CA, USA
Abstract :
A method for fabricating thermoplastic cartridges encapsulating integrated circuits, electrodes, and microfluidic channels using hot embossing is described for the application of a point of care magnetic label flow cytometer. Finished devices with a microchannel depth of 86 μm and RMS surface roughness of 1.6 μm are capable of operating at pressures of up to 227 kPa without leaks. The device was used to evaluate the efficiency of an on chip magnetic focusing structure which successfully focused 98% of the 4.5 μm Dynabeads® to a 30 μm target region using 100 mA of current and a 4 mT external field.
Keywords :
embossing; encapsulation; integrated circuit packaging; microfluidics; plastic products; Dynabeads; care magnetic label flow cytometer; current 100 mA; electrodes; hot embossing; integrated circuits; magnetic flux density 4 mT; microfluidic channels; on chip magnetic focusing structure; plastic microfluidic systems; pressure 227 kPa; size 1.6 mum; size 30 mum; size 4.5 mum; size 86 mum; thermoplastic cartridges; Embossing; Fabrication; Focusing; Microchannels; Microfluidics; Plastics; Sensors; CMOS; Microfluidics; flow cytometer; hot-embossing; lab-on-achip; magnetophoresis; packaging; plastic;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on
Conference_Location :
Anchorage, AK
DOI :
10.1109/TRANSDUCERS.2015.7181302