• DocumentCode
    731990
  • Title

    Versatile fabrication of PDMS-carbon electrodes for silicone dielectric elastomer transducers

  • Author

    Araromi, O.A. ; Rosset, S. ; Shea, H.R.

  • Author_Institution
    Microsyst. for Space Technol. Lab. (LMTS), Ecole Polytech. Fed. de Lausanne (EPFL), Neuchatel, Switzerland
  • fYear
    2015
  • fDate
    21-25 June 2015
  • Firstpage
    1905
  • Lastpage
    1908
  • Abstract
    We report a novel method for the fabrication of polydimethylsiloxane (PDMS)-carbon composite electrodes for silicone dielectric elastomer transducers. The methodology combines patterning by laser ablation and oxygen plasma induced bonding, producing stretchable and flexible devices with exceptional electrode adhesion and high mechanical robustness. The methodology also offers great flexibility in the size and scale of electrode designs; we demonstrate this in the fabrication of flexible bending actuators > 10 cm long and interdigitated capacitive sensors with micro-scale features.
  • Keywords
    adhesion; capacitive sensors; carbon; composite materials; dielectric materials; elastomers; flexible electronics; laser ablation; microsensors; plasma applications; silicones; transducers; C; PDMS; carbon composite electrodes; electrode adhesion; electrode designs; flexible bending actuators; interdigitated capacitive sensors; laser ablation; mechanical robustness; oxygen plasma; polydimethylsiloxane; silicone dielectric elastomer transducers; Actuators; Bonding; Dielectrics; Electrodes; Plasmas; Robot sensing systems; Dielectric elastomer actuators; dielectric elastomer sensor; flexible bending actuators; stretchable devices;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on
  • Conference_Location
    Anchorage, AK
  • Type

    conf

  • DOI
    10.1109/TRANSDUCERS.2015.7181323
  • Filename
    7181323