DocumentCode
731990
Title
Versatile fabrication of PDMS-carbon electrodes for silicone dielectric elastomer transducers
Author
Araromi, O.A. ; Rosset, S. ; Shea, H.R.
Author_Institution
Microsyst. for Space Technol. Lab. (LMTS), Ecole Polytech. Fed. de Lausanne (EPFL), Neuchatel, Switzerland
fYear
2015
fDate
21-25 June 2015
Firstpage
1905
Lastpage
1908
Abstract
We report a novel method for the fabrication of polydimethylsiloxane (PDMS)-carbon composite electrodes for silicone dielectric elastomer transducers. The methodology combines patterning by laser ablation and oxygen plasma induced bonding, producing stretchable and flexible devices with exceptional electrode adhesion and high mechanical robustness. The methodology also offers great flexibility in the size and scale of electrode designs; we demonstrate this in the fabrication of flexible bending actuators > 10 cm long and interdigitated capacitive sensors with micro-scale features.
Keywords
adhesion; capacitive sensors; carbon; composite materials; dielectric materials; elastomers; flexible electronics; laser ablation; microsensors; plasma applications; silicones; transducers; C; PDMS; carbon composite electrodes; electrode adhesion; electrode designs; flexible bending actuators; interdigitated capacitive sensors; laser ablation; mechanical robustness; oxygen plasma; polydimethylsiloxane; silicone dielectric elastomer transducers; Actuators; Bonding; Dielectrics; Electrodes; Plasmas; Robot sensing systems; Dielectric elastomer actuators; dielectric elastomer sensor; flexible bending actuators; stretchable devices;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on
Conference_Location
Anchorage, AK
Type
conf
DOI
10.1109/TRANSDUCERS.2015.7181323
Filename
7181323
Link To Document