Investigating the impact of stuctural symmetry in coupled resonator arrays on the frequency stability of A CMOS-MEMS oscillator

Author

Erbes, A. ; Do, C. ; Thiruvenkanathan, P. ; Seshia, A.A.

Author_Institution

Eng. Dept., Univ. of Cambridge, Cambridge, UK

fYear

2015

fDate

21-25 June 2015

Firstpage

2013

Lastpage

2016

Abstract

This paper presents experimental observations of the variations in short-term frequency stability in a low power CMOS-MEMS oscillator embedding two mechanically coupled double-ended tuning fork (DETF) resonators as a function of induced stiffness perturbations on the resonators. The Allan deviation of the 241 kHz output from the Pierce oscillator, based on a 0.35μm CMOS technology, is logged for various stiffness perturbations values applied on the two coupled resonators. The reported results show local optimum values of structural perturbations which yield to improved short-term frequency stability measures.

Keywords

CMOS integrated circuits; frequency stability; micromechanical resonators; oscillators; perturbation techniques; CMOS technology; DETF resonators; Pierce oscillator; coupled resonators; frequency 241 kHz; induced stiffness perturbations; low power CMOS-MEMS oscillator; mechanically coupled double-ended tuning fork resonators; short-term frequency stability; size 0.35 mum; structural perturbations; Frequency measurement; Micromechanical devices; Optical resonators; Oscillators; Resonant frequency; Vibrations; Voltage measurement; Coupled MEMS resonators; frequency stability; oscillators; vibration localization;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on

Conference_Location

Anchorage, AK

Type

conf

DOI

10.1109/TRANSDUCERS.2015.7181350

Filename

7181350