A fast MEMS infrared microspectrometer for the measurement of hydrocarbon gases

Author

Ebermann, M. ; Neumann, N. ; Binder, S. ; Meinig, M. ; Seifert, M. ; Kurth, S. ; Hiller, K.

Author_Institution

InfraTec GmbH, Dresden, Germany

fYear

2015

fDate

21-25 June 2015

Firstpage

2037

Lastpage

2040

Abstract

A new fast infrared microspectrometer based on a MEMS tunable Fabry-Pérot filter (μFPF) is reported. In contrast to previous designs the acquisition time for a complete spectrum is decreased 50 times and the spectral resolution is improved 3 times. This is achieved by the use of higher interference orders and the combination with a room temperature operated PbSe photodetector. Such a system will be especially useful for the measurement of hydrocarbon gases in the spectral range of (3.1...3.8) μm. The μFPF is tuned sinusoidally over the entire wavelength range in about 100 ms. Methods for offset elimination and drift compensation were developed as well.

Keywords

IV-VI semiconductors; gas sensors; infrared spectrometers; lead compounds; microsensors; optical filters; optical tuning; photodetectors; MEMS tunable Fabry-Perot filter; PbSe; drift compensation; fast MEMS infrared microspectrometer; hydrocarbon gases measurement; interference orders; offset elimination; photodetector; spectral resolution; temperature 293 K to 298 K; Band-pass filters; Detectors; Hydrocarbons; Micromechanical devices; Optical filters; Signal to noise ratio; Wavelength measurement; MEMS Fabry-Pérot filter; PbSe photodetector; drift compensation; hydrocarbon gases; offset elimination;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on

Conference_Location

Anchorage, AK

Type

conf

DOI

10.1109/TRANSDUCERS.2015.7181356

Filename

7181356