Title :
Tunable multisegment SixNy/AlN piezo lenses for wavefront correction
Author :
Zuerbig, V. ; Patz, D. ; Fries, J. ; Bichra, M. ; Pletschen, W. ; Holc, K. ; Reusch, M. ; Nebel, C.E. ; Sinzinger, S. ; Ambacher, O. ; Lebedev, V.
Author_Institution :
Fraunhofer Inst. for Appl. Solid State Phys. IAF, Freiburg, Germany
Abstract :
A combined layer structure of aluminum nitride (AlN) and silicon nitride (SixNy) enables the fabrication of multisegment piezo-actuated micro lenses with a precise control of the lens surface. It is demonstrated that these micro lenses offer free aspheric deformation of the lens surface and can operate at high repetition rates along with reproducible and precise tunability. The AlN/SixNy micro lenses are highly advantageous to be used as wave front filter or for fast focus correction.
Keywords :
III-V semiconductors; aluminium compounds; microlenses; optical fabrication; optical tuning; silicon compounds; wide band gap semiconductors; SixNy-AlN; aspheric deformation; lens surface; multisegment piezo-actuated micro lenses; precise control; repetition rates; tunability; wavefront correction; Adaptive optics; Aluminum nitride; III-V semiconductor materials; Indium tin oxide; Lenses; Optical interferometry; Optical surface waves; Micro lenses; Shack-Hartmann wavefront sensor; aluminum nitride; piezo-actuation; silicon nitride;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on
Conference_Location :
Anchorage, AK
DOI :
10.1109/TRANSDUCERS.2015.7181358
