Tunable multisegment SixNy/AlN piezo lenses for wavefront correction

Author

Zuerbig, V. ; Patz, D. ; Fries, J. ; Bichra, M. ; Pletschen, W. ; Holc, K. ; Reusch, M. ; Nebel, C.E. ; Sinzinger, S. ; Ambacher, O. ; Lebedev, V.

Author_Institution

Fraunhofer Inst. for Appl. Solid State Phys. IAF, Freiburg, Germany

fYear

2015

fDate

21-25 June 2015

Firstpage

2045

Lastpage

2048

Abstract

A combined layer structure of aluminum nitride (AlN) and silicon nitride (Si_xN_y) enables the fabrication of multisegment piezo-actuated micro lenses with a precise control of the lens surface. It is demonstrated that these micro lenses offer free aspheric deformation of the lens surface and can operate at high repetition rates along with reproducible and precise tunability. The AlN/Si_xN_y micro lenses are highly advantageous to be used as wave front filter or for fast focus correction.

Keywords

III-V semiconductors; aluminium compounds; microlenses; optical fabrication; optical tuning; silicon compounds; wide band gap semiconductors; Si_xN_y-AlN; aspheric deformation; lens surface; multisegment piezo-actuated micro lenses; precise control; repetition rates; tunability; wavefront correction; Adaptive optics; Aluminum nitride; III-V semiconductor materials; Indium tin oxide; Lenses; Optical interferometry; Optical surface waves; Micro lenses; Shack-Hartmann wavefront sensor; aluminum nitride; piezo-actuation; silicon nitride;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on

Conference_Location

Anchorage, AK

Type

conf

DOI

10.1109/TRANSDUCERS.2015.7181358

Filename

7181358