An uncooled optically readable infrared focal plane array

Author

Feng, F. ; Zhang, Y.S. ; Ge, X.H. ; Wei, X.D. ; Wang, Y.L. ; Li, X.X.

Author_Institution

State Key Lab. of Transducer Technol., Shanghai Inst. of Microsyst. & Inf. Technol., Shanghai, China

fYear

2015

fDate

21-25 June 2015

Firstpage

2081

Lastpage

2084

Abstract

This paper reports a new uncooled optically readable infrared focal plane array (UOR-IRFPA), which is fabricated on a glass substrate. Compared with conventional UOR-IRFPA fabricated on a silicon substrate, visible light (readout light) can irradiate on visible reflecting layer through glass substrate and infrared light can directly radiate on infrared absorption layer from another direction. Therefore, the new UOR-IRFPA has near 100% infrared absorption efficiency without removing silicon substrate underneath UOR-IRFPA pixels by using expensive DRIE (deep reactive ion etching). UOR-IRFPA is successfully fabricated based on MEMS (micro-electro-mechanical system) process. Infrared image of human body is obtained by using fabricated UOR-IRFPA.

Keywords

focal planes; glass; infrared detectors; light absorption; microfabrication; microsensors; optical sensors; sputter etching; DRIE; MEMS process; UOR-IRFPA; deep reactive ion etching; glass substrate; human body; infrared absorption layer efficiency; infrared imaging; microelectromechanical system process; readout infrared light; silicon substrate; uncooled optically readable infrared focal plane array; visible infrared light; visible reflecting layer; Absorption; Films; Glass; Optical device fabrication; Optical imaging; Silicon; Substrates; Infrared focal plane array (IRFPA); glass substrate; micro-electro-mechanical system (MEMS); optically readable;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on

Conference_Location

Anchorage, AK

Type

conf

DOI

10.1109/TRANSDUCERS.2015.7181367

Filename

7181367