A linear low driving voltage MEMS actuator with large lateral stroke driven by lorentz force

Author

Lv, X.D. ; Wei, W.W. ; Mao, X. ; Yang, J.L. ; Yang, F.H.

Author_Institution

Inst. of Semicond., Beijing, China

fYear

2015

fDate

21-25 June 2015

Firstpage

2117

Lastpage

2120

Abstract

This paper presents a novel MEMS actuator driven by Lorentz force. The actuator has a structure of folded beams, which is favorable for a large lateral stroke. A displacement of more than 47 μm was achieved with a magnetic field of 0.3 T and the diving current of 8 mA. The actuator can generate a large displacement under a low driving voltage and can easily be integrated with CMOS circuits. Lorentz force is proportional to the magnetic field and the driving current, which results in a linear dependence of the lateral displacement on the diving current.

Keywords

beams (structures); microactuators; CMOS circuits; Lorentz force; current 8 mA; driving current; folded beams; large lateral stroke; lateral displacement; linear low driving voltage MEMS actuator; magnetic field; magnetic flux density 0.3 T; Actuators; Force; Lorentz covariance; Magnetic fields; Magnetic flux density; Micromechanical devices; Resistance; Lorentz force; MEMS actuator; large stroke; linear control;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on

Conference_Location

Anchorage, AK

Type

conf

DOI

10.1109/TRANSDUCERS.2015.7181376

Filename

7181376