Title :
Fully-microfabricated electromagnetically-actuated membrane for microspeaker
Author :
Qian Zhang ; Eun Sok Kim
Author_Institution :
Dept. of Electr. Eng., Univ. of Southern California, Los Angeles, CA, USA
Abstract :
This paper presents an electromagnetically actuated membrane that can be microfabricated on silicon wafers in a batch process. The wax-bonded micromagnet suspended by a parylene diaphragm (7×7 mm2) is actuated by the Lorentz force when a current is applied to the dual-layer electroplated coils. Experimental results show that the electromagnetic actuation produces a flat frequency response of 0.3 μmpeak-to-peak up to 400 Hz (with 1.5 μmpeak-to-peak displacement at the resonant frequency of 420 Hz) for an applied current of 40.8 mArms into the 52 Ω coil.
Keywords :
batch processing (industrial); electromechanical actuators; microfabrication; semiconductor technology; Lorentz force; Si; batch process; current 40.8 mA; dual-layer electroplated coil; electromagnetic actuation; frequency 420 Hz; microfabricated electromagnetically-actuated membrane; microspeaker; parylene diaphragm; silicon wafers; size 7 mm; wax-bonded micromagnet; Coils; Frequency measurement; Magnetic flux; Powders; Resonant frequency; Silicon; Electromagnetic actuation; integrated magnets; microspeaker;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on
Conference_Location :
Anchorage, AK
DOI :
10.1109/TRANSDUCERS.2015.7181378
