High resolution, low offset Vertical Hall device in low-voltage CMOS technology

Vertical Hall-effect devices (VHDs) are CMOS integrated sensors dedicated to the measurement of magnetic field in the plane of the chip. At low frequency performances are severely reduced by the 1/f noise. We recently proposed a theoretical study which confirm the capability of the spinning current technique to lower the 1/f noise on Low-Voltage VHD. In this paper, we proposed a practical way for the implementation of this technique. Experimental results bring out significant improvements. An offset of 0.1 mT and a resolution of 37 μT has been measured over a 1.6 kHz bandwidth.