Title :
Flexible Sputter-Deposited Carbon Strain Sensor
Author :
Tata, Uday ; Hung Cao ; Nguyen, Cuong M. ; Jung-Chih Chiao
Author_Institution :
Dept. of Electr. Eng., Univ. of Texas at Arlington, Arlington, TX, USA
Abstract :
In this letter, we report a piezoresistive amorphous carbon strain sensor fabricated on a flexible polyimide substrate. Amorphous carbon was sputter-deposited onto a 125-μm-thick polyimide film and the strain gauges were tailored using laser micromachining. The strain sensors were tested by using a cantilever setup to obtain sensitivity, hysteresis, repeatability, and dynamic response. Gauge factors in the range of 6-9 have been achieved.
Keywords :
amorphous state; cantilevers; carbon; dynamic response; hysteresis; laser beam machining; micromachining; microsensors; piezoresistive devices; polymer films; sputter deposition; strain gauges; strain sensors; thick film sensors; C; cantilever; dynamic response; flexible polyimide substrate; flexible sputter deposition; gauge factor; hysteresis; laser micromachining; piezoresistive amorphous carbon strain sensor; repeatability; sensor sensitivity; size 125 mum; strain gauge; thick polyimide film; Carbon; Polyimides; Robot sensing systems; Sensitivity; Strain; Substrates; Temperature measurement; Amorphous carbon; flexible substrate; gauge factor; polyimide and strain sensor;
Journal_Title :
Sensors Journal, IEEE
DOI :
10.1109/JSEN.2012.2229563
