Title :
Advanced laser lift off in the manufacturing of LEDs
Author :
Mendes, Marco ; Porneala, Cristian ; Xiangyang Song ; Hannon, Mathew ; Sarrafi, Rouzbeh ; Schoenly, Joshua ; Sercel, Dana ; Dennigan, Sean ; VanGemert, Roy ; Chaplin, Heath ; Bickley, John ; Sercel, Jeff
Author_Institution :
Microsyst. Div., IPG Photonics, Manchester, NH, USA
Abstract :
Advanced laser lift off (LLO) techniques leading to high quality and high throughput fabrication of vertical and flip chip GaN and AlN based LEDs are discussed.
Keywords :
III-V semiconductors; aluminium compounds; gallium compounds; laser materials processing; light emitting diodes; optical fabrication; AlN; GaN; advanced laser lift off techniques; flip chip aluminium nitride based LED fabrication; flip chip gallium nitride based LED fabrication; vertical chip aluminium nitride based LED fabrication; vertical chip gallium nitride based LED fabrication; Aluminum nitride; Gallium nitride; III-V semiconductor materials; Laser beams; Light emitting diodes; Photonic band gap; Throughput;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2015 Conference on
Conference_Location :
San Jose, CA
