Title :
High power laser-sustained plasma lightsources for KLA-Tencor broadband inspection tools
Author :
Bezel, I. ; Delgado, G. ; Derstine, M. ; Gross, K. ; Solarz, R. ; Shchemelinin, A. ; Shortt, D.
Author_Institution :
Technol. Group, KLA-Tencor Corp, Milpitas, CA, USA
Abstract :
For the last 8 years, the brightness of UV lightsources in KT Broadband inspection tools increased by orders of magnitude due to advances in LSP technology. Challenges of LSP in high-power regime are discussed here.
Keywords :
light sources; optical testing; plasma sources; KLA-Tencor broadband inspection tools; LSP technology; brightness; high power laser-sustained plasma light sources; Brightness; Broadband communication; Inspection; Optical pumping; Plasma temperature;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2015 Conference on
Conference_Location :
San Jose, CA
