Title :
Surface sensitive microfluidic optomechanical ring resonator sensors
Author :
Kyu Hyun Kim ; Xudong Fan
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., Univ. of Michigan, Ann Arbor, MI, USA
Abstract :
Sensitivity of the optomechanical resonator to the surface mass change is demonstrated to be 1.2 Hz per pg/mm2 by gradually removing SiO2 molecules from the resonator surface. A detection limit of 83 pg/mm2 is achieved.
Keywords :
micro-optics; microfluidics; micromechanical resonators; microsensors; optical resonators; silicon compounds; SiO2; detection limit; microfluidic optomechanical ring resonator sensors; resonator surface; surface mass change; surface sensitive optomechanical ring resonator sensors; Biomedical optical imaging; Optical imaging; Optical ring resonators; Optical sensors; Resonant frequency;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2015 Conference on
Conference_Location :
San Jose, CA
