Title :
Fabrication of gratings with low spacing error by the dual-beam exposure system with spherical lens
Author :
Shiwei Wang ; Lijiang Zeng
Author_Institution :
Dept. of Precision Instrum., Tsinghua Univ., Beijing, China
Abstract :
We propose a feedback method of adjusting the dual-beam exposure system with spherical collimation lenses based on deducing the spacing error from diffraction wavefront. The grating of 0.03 λ in 70×70 mm2 can be achieved.
Keywords :
diffraction gratings; lenses; optical fabrication; diffraction wavefront; dual-beam exposure system; feedback method; grating fabrication; spacing error; spherical collimation lenses; Diffraction; Diffraction gratings; Gratings; Lenses; Measurement uncertainty; Optical interferometry; Substrates;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2015 Conference on
Conference_Location :
San Jose, CA
