Title :
Silicate spin-on-glass as an overcoat layer for SiO2 ridge waveguides
Author :
Stott, Matthew A. ; Wall, Thomas A. ; Ozcelik, Damla ; Parks, Joshua W. ; Meena, Gopikrishnan G. ; Hamilton, Erik ; Chu, Roger ; Schmidt, Holger ; Hawkins, Aaron R.
Author_Institution :
Dept. of Electr. & Comput. Eng., Brigham Young Univ., Provo, UT, USA
Abstract :
Silicate spin-on-glass is used to coat PECVD SiO2 waveguides in order to smooth out surface topology and act as a moisture barrier. The measured optical throughput improved compared to uncoated waveguides.
Keywords :
optical glass; optical waveguides; plasma CVD coatings; ridge waveguides; silicon compounds; PECVD ridge waveguides; SiO2; moisture barrier; optical throughput; overcoat layer; silicate spin-on-glass; surface topology; Optical device fabrication; Optical films; Optical reflection; Optical refraction; Optical variables control; Optical waveguides;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2015 Conference on
Conference_Location :
San Jose, CA
