• DocumentCode
    732993
  • Title

    Silicate spin-on-glass as an overcoat layer for SiO2 ridge waveguides

  • Author

    Stott, Matthew A. ; Wall, Thomas A. ; Ozcelik, Damla ; Parks, Joshua W. ; Meena, Gopikrishnan G. ; Hamilton, Erik ; Chu, Roger ; Schmidt, Holger ; Hawkins, Aaron R.

  • Author_Institution
    Dept. of Electr. & Comput. Eng., Brigham Young Univ., Provo, UT, USA
  • fYear
    2015
  • fDate
    10-15 May 2015
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    Silicate spin-on-glass is used to coat PECVD SiO2 waveguides in order to smooth out surface topology and act as a moisture barrier. The measured optical throughput improved compared to uncoated waveguides.
  • Keywords
    optical glass; optical waveguides; plasma CVD coatings; ridge waveguides; silicon compounds; PECVD ridge waveguides; SiO2; moisture barrier; optical throughput; overcoat layer; silicate spin-on-glass; surface topology; Optical device fabrication; Optical films; Optical reflection; Optical refraction; Optical variables control; Optical waveguides;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics (CLEO), 2015 Conference on
  • Conference_Location
    San Jose, CA
  • Type

    conf

  • Filename
    7183430
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=732993