Title :
Permanent trimming of silicon ring resonator filters by thermal modification
Author :
Spector, S.J. ; Knecht, J.M. ; Juodawlkis, P.W.
Author_Institution :
Lincoln Lab., Massachusetts Inst. of Technol., Lexington, MA, USA
Abstract :
Reported here is a method for trimming the resonant frequency of microring resonators by permanent thermal modification of a waveguide cladding. This method would use in-situ heaters, avoiding the need for highly specialized equipment.
Keywords :
elemental semiconductors; micro-optomechanical devices; micromechanical resonators; optical resonators; optical waveguide filters; optical waveguides; resonator filters; silicon; Si; in-situ heaters; microring resonators; permanent thermal modification; permanent trimming; resonant frequency; silicon ring resonator filters; waveguide cladding; Filter banks; Heating; Indexes; Optical filters; Optical ring resonators; Optical variables control; Resonant frequency;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2015 Conference on
Conference_Location :
San Jose, CA
