Title :
Triple metal-film subwavelength gratings on both sides of a silicon substrate for mid-infrared polarizers
Author :
Shiraishi, K. ; Higuchi, S. ; Kakinuma, H. ; Shimizu, J. ; Yoda, H. ; Ohno, H.
Author_Institution :
Grad. Sch. of Eng., Utsunomiya Univ., Utsunomiya, Japan
Abstract :
Triple thin metal-film subwavelength gratings on both sides of a silicon substrate are fabricated for polarizers in the mid-infrared wavelength region of 10-20 μm. Measured TE-wave losses are higher than 30dB for the wavelength range, while the TM-wave losses are lower than 2.0dB in the wavelength range of 16.5-19.5μm.
Keywords :
diffraction gratings; infrared spectra; integrated optics; light polarisation; optical fabrication; optical films; optical losses; optical polarisers; optical variables measurement; silicon; Si; TE-wave loss measurement; mid-infrared polarizers; silicon substrate; triple metal-film subwavelength grating fabrication; wavelength 10 mum to 20 mum; Films; Gratings; Loss measurement; Optical losses; Silicon; Substrates; Wavelength measurement;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2015 Conference on
Conference_Location :
San Jose, CA
