Title :
Bending behavior of flexible crystalline silicon nanomembrane photonic crystal microcavities
Author :
Xiaochuan Xu ; Subbaraman, Harish ; Chakravarty, Swapnajit ; Chen, Ray T.
Author_Institution :
Univ. of Texas at Austin, Austin, TX, USA
Abstract :
We demonstrated a flexible crystalline silicon nanomembrane photonic crystal microcavity with a quality factor of 22,000 and experimentally studied its bending behavior.
Keywords :
Q-factor; bending; elemental semiconductors; micro-optics; microcavities; nanophotonics; optical testing; photonic crystals; silicon; Si; bending behavior; flexible crystalline silicon nanomembrane photonic crystal microcavities; quality factor; Films; Microcavities; Photonic crystals; Photonics; Polyimides; Silicon; Strain;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2015 Conference on
Conference_Location :
San Jose, CA
