Title :
Enhanced coupling in Si3N4 slot-mode optomechanical crystals via stress tuning
Author :
Grutter, Karen E. ; Davanco, Marcelo ; Srinivasan, Kartik
Author_Institution :
Center for Nanoscale Sci. & Technol., Nat. Inst. of Stand. & Technol., Gaithersburg, MD, USA
Abstract :
We demonstrate Si3N4 slot-mode optomechanical crystals with optical Qs up to 1.65 × 105 and mechanical frequencies around 3.4 GHz. Tensile stress tunes gap widths down to 24 nm, enhancing coupling and enabling radiation-pressure-driven self-oscillation.
Keywords :
photonic crystals; piezo-optical effects; radiation pressure; silicon compounds; Si3N4; Si3N4 slot-mode optomechanical crystals; enhanced coupling; frequency 3.4 GHz; gap widths; mechanical frequencies; optical Qs; radiation-pressure-driven self-oscillation; stress tuning; tensile stress; Crystals; Optical beams; Optical coupling; Optical design; Optical device fabrication; Optical imaging;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2015 Conference on
Conference_Location :
San Jose, CA