Title :
Si3N4 multilayer platform for photonic integrated circuits
Author :
Kuanping Shang ; Pathak, Shibnath ; Binbin Guan ; Guangyao Liu ; Chuan Qin ; Scott, Ryan P. ; Yoo, S.J.B.
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of California, Davis, Davis, CA, USA
Abstract :
We design, fabricate, and demonstrate an optimized silicon nitride multilayer platform including ultra-low interlayer vertical coupling loss of 0.05 dB, multilayer crossing loss of 0.265 dB at 90° crossing angle, and 50 μm bending radius.
Keywords :
integrated optoelectronics; optical design techniques; optical fabrication; optical losses; optical multilayers; optical waveguides; silicon compounds; Si3N4; bending radius; crossing angle; multilayer crossing loss; multilayer waveguides; photonic integrated circuits; silicon nitride multilayer platform; ultralow interlayer vertical coupling loss; Couplers; Couplings; Nonhomogeneous media; Optical losses; Optical waveguides; Silicon; Waveguide discontinuities;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2015 Conference on
Conference_Location :
San Jose, CA
