• DocumentCode
    733753
  • Title

    Crystalline silicon on silicon nitride hybrid platform for integrated photonic applications

  • Author

    Hosseinnia, Amir H. ; Atabaki, Amir H. ; Qing Li ; Moradinejad, Hesam ; Sodagar, Majid ; Ghasemi, Farshid ; Eftekhar, Ali A. ; Adibi, Ali

  • Author_Institution
    Sch. of Electr. & Comput. Eng., Georgia Inst. of Technol., Atlanta, GA, USA
  • fYear
    2015
  • fDate
    10-15 May 2015
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    We demonstrate a hybrid material platform, in which a layer of crystalline silicon is placed on top of a silicon nitride on a silicon dioxide die. We also report an efficient interlayer coupling structure with 0.02 dB insertion loss. Using this hybrid platform, high-Q resonators are demonstrated.
  • Keywords
    integrated optics; optical losses; optical materials; optical multilayers; optical resonators; silicon; silicon compounds; Si-SiN-SiO2; crystalline silicon on silicon nitride hybrid platform; high-Q resonators; hybrid material platform; insertion loss; integrated photonic applications; interlayer coupling structure; loss 0.02 dB; silicon dioxide die;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics (CLEO), 2015 Conference on
  • Conference_Location
    San Jose, CA
  • Type

    conf

  • Filename
    7184195
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=733753