Title :
Crystalline silicon on silicon nitride hybrid platform for integrated photonic applications
Author :
Hosseinnia, Amir H. ; Atabaki, Amir H. ; Qing Li ; Moradinejad, Hesam ; Sodagar, Majid ; Ghasemi, Farshid ; Eftekhar, Ali A. ; Adibi, Ali
Author_Institution :
Sch. of Electr. & Comput. Eng., Georgia Inst. of Technol., Atlanta, GA, USA
Abstract :
We demonstrate a hybrid material platform, in which a layer of crystalline silicon is placed on top of a silicon nitride on a silicon dioxide die. We also report an efficient interlayer coupling structure with 0.02 dB insertion loss. Using this hybrid platform, high-Q resonators are demonstrated.
Keywords :
integrated optics; optical losses; optical materials; optical multilayers; optical resonators; silicon; silicon compounds; Si-SiN-SiO2; crystalline silicon on silicon nitride hybrid platform; high-Q resonators; hybrid material platform; insertion loss; integrated photonic applications; interlayer coupling structure; loss 0.02 dB; silicon dioxide die;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2015 Conference on
Conference_Location :
San Jose, CA
