Title :
Broadband mid-infrared frequency comb generation in a Si3N4 microresonator
Author :
Luke, Kevin ; Okawachi, Yoshitomo ; Lamont, Michael R. E. ; Gaeta, Alexander L. ; Lipson, Michal
Author_Institution :
Sch. of Electr. & Comput. Eng., Cornell Univ., Ithaca, NY, USA
Abstract :
We demonstrate broadband frequency comb generation in the mid-infrared from 2.3 to 3.5 μm in a Si3N4 microresonator with Q=850,000 fabricated using an optimized process for decreasing intrinsic losses and overcoming stress limitations.
Keywords :
micro-optomechanical devices; microfabrication; micromechanical resonators; optical fabrication; optical frequency combs; optical losses; optical resonators; silicon compounds; Si3N4; broadband mid-infrared frequency comb generation; intrinsic losses; microresonator; stress limitations; wavelength 2.3 mum to 3.5 mum; Absorption; Annealing; Dispersion; Films; Optical ring resonators; Resonant frequency; Silicon;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2015 Conference on
Conference_Location :
San Jose, CA
