Title :
Fabrication of complex three-dimensional metallic microstructures based on femtosecond laser micromachining
Author :
Feng Chen ; Qing Yang ; Chao Shan ; Keying Liu ; Xiangwei Meng ; Xun Hou
Author_Institution :
State Key Lab. for Manuf. Syst. Eng., Xi´an Jiaotong Univ., Xi´an, China
Abstract :
The fabrication of complex metallic microstructures based on femtosecond laser micromachining and metal microsolidify process is demonstrated. This method is beneficial for building complex embedded 3D metal microstructures, electronic components, and hybrid electronic-microfluidic devices.
Keywords :
high-speed optical techniques; laser beam machining; microfluidics; micromachining; optical fabrication; solidification; 3D metal microstructures; complex three-dimensional metallic microstructures; electronic components; femtosecond laser micromachining; hybrid electronic-microfluidic devices; metal microsolidify process; Coils; Fabrication; Metals; Microchannels; Microstructure; Three-dimensional displays; Ultrafast optics;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2015 Conference on
Conference_Location :
San Jose, CA
