Title :
Nanoscale composition imaging by extreme ultraviolet laser ablation mass spectrometry
Author :
Kuznetsov, Ilya ; Filevich, Jorge ; Feng Dong ; Woolston, Mark ; Chao, Weilun ; Anderson, Erik H. ; Bernstein, Elliot R. ; Crick, Dean C. ; Rocca, Jorge J. ; Menoni, Carmen S.
Abstract :
The first nano-scale 3-dimensional composition imaging is demonstrated. EUV laser ablation enables composition maps with 75 nm lateral, 20 nm depth resolution, and 0.01 amol sensitivity. 3D composition images of a single micro-organism were obtained.
Keywords :
laser ablation; mass spectroscopy; nanophotonics; ultraviolet sources; 3D composition images; EUV laser ablation; extreme ultraviolet laser ablation mass spectrometry; nanoscale composition imaging; Imaging; Mass spectroscopy; Nanoscale devices; Spatial resolution; Three-dimensional displays; Ultraviolet sources;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2015 Conference on
Conference_Location :
San Jose, CA
