Peak-to-peak controller design for a dual-stage actuation system with input saturation

In this paper, the plant model and closed-loop performance of a newly developed slider driven micro-electromechanical system (MEMS) is investigated. The model and hysteresis of this new MEMS thermal actuator (MTA) is presented first. Then, the peak-to-peak gain minimization method, which focuses on minimizing the best upper bound on the control signal peak value, is applied to satisfy the input saturation. The experimental results verify the effectiveness of the proposed method by comparing with the traditional H∞ method, which uses the weighting function to lower the energy of the control signals.