Design, Fabrication, and Testing of an MEMS Microgripper With Dual-Axis Force Sensor

This paper presents the design and fabrication of a new microelectromechanical systems microgripper with integrated electrostatic actuator and capacitive force sensor. One uniqueness of the proposed microgripper is that it possesses a single force sensor which can measure the gripping force and environmental interaction force in two axes in an alternate manner. The gripper structure is devised based on compliant rotary bearing and linear guiding flexure mechanisms, which enable the generation of a compact size. Analytical models are established to facilitate the parametric design of the gripper, which are verified by performing finite-element analysis simulation study. The microgripper is fabricated by the silicon-on-insulator-based process. Experimental calibrations are conducted to demonstrate the gripping and sensing performances. The feasibility and effectiveness of the developed gripper device are validated through the experimental investigations on gripping a human hair.