Single-Structure Micromachined Three-Axis Gyroscope With Reduced Drive-Force Coupling

This letter presents a micromachined silicon three-axis gyroscope based on a triple tuning-fork structure utilizing a single vibrating element. The mechanical approach proposed in this letter uses a secondary “auxiliary” mass rather than a major “proof” mass to induce motion in the proof mass frame for Coriolis force coupling to the sense mode. These auxiliary masses reduce the unwanted mechanical coupling of force and motion from the drive mode to the three sense modes. The experimental data show that the bias error due to coupling is reduced by a factor up to 10, and the bias instability of each sense axis is reduced by a factor of up to 3 when the gyroscope is actuated using the auxiliary masses rather than the major masses. The gyroscope exhibits a bias instability of 0.016°/s, 0.004°/s, and 0.043°/s for the x-, y-, and z-sense modes, respectively. Furthermore, initial temperature characterization results show that the gyroscope actuated by the auxiliary masses ensures a better bias instability performance in each sense axis over a temperature range from 10 °C to 50 °C in comparison with the gyroscope actuated by the major masses.