DocumentCode :
740299
Title :
High-Q and High-Sensitivity Photonic Crystal Cavity Sensor
Author :
Zhang, Yuguang ; Han, Shoubao ; Zhang, Senlin ; Liu, Penghao ; Shi, Yaocheng
Volume :
7
Issue :
5
fYear :
2015
Firstpage :
1
Lastpage :
6
Abstract :
We present the design, fabrication, and the characterization of a high-quality-factor (Q) and high-sensitivity photonic crystal (PhC) cavity sensor on the silicon-on-insulator platform. By optimizing the structure of the PhC cavity, most of the light can be distributed in the lower index region; thus, the sensitivity can be dramatically improved. The transmission spectrum of the PhC cavity sensor is measured by immersing the device into a sodium chloride (NaCl) solution of different mass concentrations. A Q factor of 
and a very high sensitivity of 428 nm/RIU have been experimentally demonstrated. Furthermore, the total size for the sensing part of the PhC cavity sensor is only 
.
Keywords :
Cavity resonators; Optical device fabrication; Optical refraction; Optical sensors; Optical variables control; Q-factor; Sensitivity; Photonic crystal (PhC); Silicon-On-Insulator; optical resonators; optical sensors; photonic crystal (PhC); silicon-on-insulator;
fLanguage :
English
Journal_Title :
Photonics Journal, IEEE
Publisher :
ieee
ISSN :
1943-0655
Type :
jour
DOI :
10.1109/JPHOT.2015.2469131
Filename :
7206520
Link To Document :
